Products
III-V de-oxigination furnace
Seal welding furnace(oven)
Technical proposal
1. Purpose
This equipment is used in gallium arsenide, indium phosphide and other mono- crystal crystal material vacuum tube sealing process equipment, automatic control system, manual operation (6-inch single crystal tube sealing / baking process).
2. Main technical indicators
2.1. External form: Single-tube horizontal structure
2.2. Maximum design temperature: 1000℃
2.3. Operating temperature range: 100℃-1000℃
2.4. Furnace body length: 1500mm
2.5. Effective internal diameter of the heating furnace: Φ 215mm
2.6. Outer diameter of process quartz pipe: Suitable for 6 inch (a set of 6 inch vacuum clips)
2.7. Temperature control: YH develops YH-8500 system (automatic touch screen control)
2.8. Accuracy of the constant temperature zone: ± 1℃ / 600mm (within working range)
2.9. Temperature repeatability: ≤±1℃／ 24h
2.10. Slant change ability: Maximum controllable heating rate of 15℃ / min
Maximum controllable cooling rate:> 5℃ / min
2.11. Total power: 20KW
2.12. Total thermal insulation power: Below 9KW
2.13. Spike Warm control: K scale division
2.14. Working vacuum degree: ≤10X10-4Pa
2.15. Seal performance: Air leakage rate is 1X10-7Pa ·m3／s
2.16. Vacuum unit: The primary pump uses a mechanical pump, and the secondary pump uses a molecular pump
2.17. Vacuum valve: Automatic electromagnetic vacuum butterfly valve
2.18. Air tightness of the gas road system: 1X10-7Pa ·m3／s
2.19. Alarm system: Over-temperature alarm, even break alarm, vacuum fault alarm, abnormal vacuum chamber pressure report guard against
2.20. Control mode: Procedure control temperature (complete touch screen control)
2.21. Power: Three-phase four-wire line is 380V
Reserved all the way to vent
3. Structure description of the vacuum furnace
Vacuum furnace is mainly composed of host, control system and vacuum system.
3.1 Host
The main engine is composed of furnace frame, open-cover heating furnace body, working chamber, cooling system, power regulating parts, etc.
3.2 Deoxyfurnace frame
The frame is horizontal single station structure, made of standard square steel welding, cutting, bending, drilling, shaving and grinding. The stainless steel is 316L frosted stainless steel plate. Computer paint, exquisite workmanship, shape color customers, or use standard white.
The heating body is composed of heating furnace wire, insulator, insulation cotton, insulation Morgan board, shell, and port ring. The constant temperature area of the furnace body is 600mm * 3 area.
Inner diameter of Φ 215mm. The temperature control technology is adopted to ensure the accuracy of the temperature in the constant temperature area and the safety of the furnace body.
1) Furnace wire: using Swedish KANTHAL, A-1 brand, Φ
2.5mm furnace wire, can work in 1000℃ for A long time, heating furnace wire adopts 3 sections of temperature control structure, heating winding and other special technologies and molds, to ensure the uniformity of furnace wire diameter when winding the furnace wire.
2) Insulation material: the material and packaging process of the insulation material are designed and calculated according to the specific use requirements of the furnace body. Choose the UK Morgan company containing zirconium plug fiber needle blanket, this kind of insulation material fiber length, small fiber diameter,
suitable bulk weight, high pore rate, the main composition is AL203, less impurities, thermal insulation performance is superior. In the packaging process, in strict accordance with the requirements of "seamless" packaging, through the tooling to achieve packaging tightness, sparse degree.
3) the mouth ring: the mouth ring using light ceramic fiber material to effectively maintain thermal insulation
4) working cavity: stainless steel. The outer diameter of the quartz tube is Φ 190mm, the constant temperature zone is 600mm * 3, and the device is deoxygenation in the quartz tube. The stainless steel part is made of imported stainless steel material, high-precision welding, to ensure clean, long-term work will not pollute the device. The quartz part and the stainless steel part are connected by the stainless steel sealing flange. The stainless steel part is equipped with bolt type sealing flange, vacuum flange, adjustable speed built-in process gas inlet pipe, pressure detection joint, high and low vacuum measuring joint, studio flange, vent valve and water-cooled clamp.
5) Water cooling system: cool the working chamber and the molecular pump respectively. The main ensure that the vacuum sealing ring is not affected by high temperature, ensure the vacuum degree. Also cool the diffusion pump bearings.
6) Power regulation module
Using MTC power module, simple wiring, convenient maintenance, strong overload capacity, applicable to all kinds of control signals (phase shift, over zero, weekly wave over zero), is a standardized unit with strong interchangeability.1 module per regulatory unit.
3.3 Control system
3.3.1. Temperature control: The control system adopts the imported temperature control meter (Omron E5CN-H controller, control accuracy within 0.5 degrees) + programmable controller (Omron PLC) + 10-inch touch screen. Touch screen operation is sensitive, quick response, no lag phenomenon. Using imported high-precision, special intelligent instrument for temperature control. The main control unit (PLC) communicates with the meter through the RS485 communication port and performs the temperature curve. The temperature control meter uses a self-fixed PID for precise temperature control. The self-set PID is more suitable for specific control, and the control accuracy can be controlled at 0. 1%. The temperature control meter has strong anti-interference ability, and no large interference to the control system. There is a cold end of the temperature compensation inside the instrument, which reduces the influence of the external temperature change on the temperature fluctuation of the thermocouple, and further enhances the control accuracy. The temperature control process of each furnace body can be independently controlled, and multiple process curves can be stored for each furnace body. Each process curve can be composed of more than 20 process steps, which is especially suitable for the requirements of semiconductor production process.
The system uses the IO unit of PLC to control the external signal input (such as buttons, sensor, etc.) and output (such as alarm output, various indicator lights, etc.). The alarm function of this system is quite complete, and the alarm information can also be displayed on the touch screen.(Alarm system is attached)
3.4. Sofeware function:
3.4.1. Query the previous temperature measurement records; historical data and temperature curve.
3.4.2. Curve view function: with temperature, gas, power, vacuum degree and other viewing functions;
3.4.3. hand / automatic control function: with temperature, gas, power setting, switch valve control function;
3.4.4. Alarm view function: it has the function of inquiring the alarm type;
3.4.5. power limit protection: different temperature can be set to different maximum power;
3.4.6. Classified management, different personnel can modify different parameters according to the login situation.
3.4.7. Data export function, can be recorded through the disk temperature, flow data exported to the U disk U.
The system hardware has a very flexible expansion ability, which can easily expand the push and pull boat drive control function and the gas flow meter control function for each furnace body.
The hardware structure of the system is shown in Figure 1 below (the structure of only one set of temperature control system is drawn).
Figure 1. Hardware structure diagram of the system
3.4.8. Thermocouple: the furnace body temperature control thermocouple adopts K degree thermocouple to control the furnace temperature, and a thermal couple is used for overtemperature protection.
3.4.9. Safety protection and alarm device
1) Overtemperature alarm: when the furnace temperature exceeds the set value, the panel warning. The overtemperature alarm light is on and on. Main control for protection and alarm.
2) Limit furnace temperature alarm: when the furnace temperature continues to rise due to the fault exceeds the alarm set value, reaching the limit furnace temperature, the overtemperature heater will automatically power off. The heater was prevented from being burned out. The limit overtemperature alarm setting value can be set according to the actual working temperature of the user.
3) Break-even protection: in the control of the hot couple or alarm thermal couple break or poor contact, there will be an overtemperature alarm or limit overtemperature alarm state. Inform the operator to correct the fault timely. Thus protecting the heating system.
4) Power failure protection: automatically switch to the nitrogen protection state under the abnormal state of power failure. Automrecord program breakpoint parameters for power power.
5) Vacuum abnormal alarm:
6) Working cavity pressure alarm: when the pressure in the studio is abnormal, there will be an alarm prompt.
3.5. Vacuum System
The vacuum unit is composed of an oil-free molecular pump and a front-stage vacuum pump. The primary pump adopts direct connected mechanical pump, and the stainless steel pipe is installed on the side of the stainless steel part of the working chamber, and the pipe is connected to the molecular pump. Equipped with high vacuum electric valve, the primary mechanical pump is connected through the stainless steel corrugated pipe, and equipped with two pneumatic vacuum angle valve, vacuum measurement has two thermal gauge (low vacuum measurement), an ionization gauge (for high vacuum measurement) when the initial vacuum, the pneumatic Angle valve automatically open, the lower pneumatic Angle valve automatically closed. Also close the high-vacuum electric valve connected to the diffusion. When pumping the vacuum, close the upper pneumatic Angle valve, open the lower pneumatic Angle valve, and open the high vacuum valve connected to the molecular pump. Convenient operation. The vacuum degree adopts the digital display mode, which is intuitive and clear.
4. Design and manufacture
1. the whole machine runs smoothly, firm structure, reliable, no jitter and other abnormal phenomena.
2. The design and manufacture (including accessories) shall meet the following national standards:
Safety voltage; safety of mechanical equipment; leakage protection; noise of environmental health protection line.
5. Circuit requirements
According to the requirements of the GB3805 standards
According to the requirements of the GB8196 standards
According to the requirements of the GB6829 standards
According to the requirements of the GB5083 standards
Meet the national industrial equipment installation requirements
5.1. Adopt three-phase five-wire system, and have reliable grounding
5.2. Provide uniform specifications of cable slot, and provide control switch and emergency stop switch of both ends of each line body
5.3. When controlling electrical appliances and supporting equipment, the temperature rise shall not exceed the product standard rating, and there is good overload protection.
6. The material appearance and color
6.1. Tainless steel profile straight, no scars, surface oxidation to maintain the original color.
6.2 Steel after anti-rust, oil treatment, paint smooth, smooth.
6.3. The whole steel in addition to baking paint, other are black or galvanized, chrome plating treatment.
6.4. The overall color is milky white, or the color specified by mountain customers.
7. Installation and commisioning
Our technical personnel to the user site free installation and debugging, and trial operation. After the technical indicators are qualified, the acceptance report shall be issued. The Buyer may appoint personnel to our free training (including basic principles of equipment, installation, commissioning, operation and daily maintenance).
8. Shelf life
8.1. The shelf life of the whole machine is one year (counting from the date of passing the final acceptance inspection).
8.2. Reserve the furnace body for 1 year.
8.3. For any fault caused by the design and manufacturer, Party B shall repair and replace the parts free of charge, and the shelf life of the replaced parts is one year.
9. Equipment and technical data
9.1 Electrical drawings, mechanical drawings, and gas pipeline drawings
9.2 List and description of spare parts
9.3. Instructions for purchased parts
(The equipment appearance diagram is attached below)
Note: The equipment does not contain for all the quartz pipe fittings
