III-V synthesis furnace

Technical scheme of polycrystalline synthesis furnace

One, Instruction for the use of the equipment:

This device is used in the perfect equipment of polycrystalline synthesis, fully automatic control system, manual operation (6-inch GaA s polycrystalline synthesis).

Two, Equipment performance features:

1. The machine structure: imported CNC sheet metal machine tool processing, high quality imported / domestic cold rolled plate manufacturing, the machine structure is reasonable, comparable to imported similar equipment.

2. Technical performance indicators: all reach or close to the technical indicators of imported equipment, and highlight the stability and consistency of products.

3. Automatic control system:

A. The color LCD touch screen in Chinese interface, process parameter display (temperature, running time, curve state, flow, etc.), modification, history record, etc., the operation is more intuitive and convenient;

B. The control system adopts PLC touch screen + temperature control meter and double insurance system;

C. The control system is in the automatic mode;

D. The temperature control system has an independent detection and alarm system;

E. Data setting mode: LCD touch screen setting;

F. Users can store multiple different process program curves.

4. the equipment is equipped with the furnace body current, resistance, and furnace body replacement prompt function, can protect the customer products from damage, as well as the regular replacement of the furnace body, etc., complete monitoring of the use status of the furnace body and regular replacement of alarm warning system.(The system is developed by Yuhao Company itself).

5. the operation mode is modular structure.

Three, Type:

Way: Right-hand operation mode

Number of pipes: 1 Pipe system

Four, Thermal data:

Working temperature: ＜1300℃

Number of temperature sections: 8 in high temperature area + 3 in low temperature area, high temperature length 1000mm, and low temperature length 750mm

Accuracy and length of temperature zone (static closed pipe test):

1000℃ Operating temperature 1300℃: 600mm /±0.3℃

300℃ <Operating temperature <600℃: 300mm / ±1℃

Single-point temperature stability (static closed tube test):

300℃ Operating temperature: 600℃: ±1℃/24h

600℃ <Operating temperature <1300℃: 3±0℃/24h

Temperature increase time

(rising from room temperature to 1300℃): ≤60min 

Temperature change ability:

Maximum controllable temperature heating rate (300~1300℃): 15℃ / min

Maximum cooling rate (1300~900℃): 4℃/min

Five, Energy consumption value

Three-phase and five-wire system: 380V ±10%，50Hz ±1Hz;

Maximum heating power: 15 KVA / 15 per tube；

Thermal insulation power: 8 KVA / per tube.

Six, Height of furnace center(To the ground):

Single tube: 1300mm

Effective internal diameter of the furnace body: High temperature section diameter φ180mm; low temperature section diameter φ140mm.

Seven, Structure Description and Main Parts Description:

1. Host:

The main structure of a polycrystalline furnace system: control system, cooling system, heating system, etc.

2 eating furnace body, the lower part is 11 sets of power adjustment components, transformers, and other parts.

(See the attached figure for the structure.)

2. Heating furnace body:

The heating wire of the furnace body adopts the imported furnace wire. The furnace body is heated at 11 sections, temperature controlled at 11 points, and the insulation layer is imported high temperature aluminum silicate fiber felt and plug paper. The furnace is used in the normal operating temperature range, to ensure that the furnace can not collapse within one year, and the furnace wire will not appear loose or shift phenomenon. The position of the furnace body can be fine-tuned during the installation process.

3. Water-cooling and heat exchanger:

The top of the furnace is equipped with an exhaust hood to remove part of the heat generated by the heating engine through the water-cooled exchanger.

4. Power regulating components:

The high-precision power adjustment board is adopted, and the heating power changes evenly, with little interference to the power grid, reliable trigger and over-zero trigger.

5. Control system

Eight, Introduction to the control system of polycrystalline synthesis furnace:

1. System structure

The system adopts the modular structure design, and the high-precision program temperature controller, touch-type integrated industrial controller, controller, power components and so on are all independent. System risk dispersion, reduce the overall failure rate of equipment, and facilitate future equipment maintenance.

2. The system framework is provided as follows:

3. Touch-type integrated industrial control machine:

4. Touch screen: rich graphic design, 10.2-inch widescreen.

5. Reliability: anti-interference performance reaches the industrial level III standard, using LED backlight, 400M main frequency, 128MB of memory, 128MB of storage space, data support U disk export, the whole machine power consumption is only 6W. The embedded development software enables temperature data collection, display, setting and storage, animation display and control, animation display and control of gas path image, rich process curve selection, real-time curve, history curve, and alarm record.6, temperature control module: adopt 0.1 level accuracy, 50 section program temperature control module, 16 bit A / D conversion, realize four and A half display function, thousand with decimal point display. The control mode adopts the silicon-controlled phase shift trigger mode, and provides the amplitude limit function to realize the temperature control error: ± 0.5℃. Provide servo start function, and provide a variety of program operation mode selection after power outage restart: (standby start, servo start, temperature waiting, etc.)

function of system

The system has the function of manual control / automatic operation to realize the intelligent program control of heating, constant temperature and cooling. Artificial intelligence PID adjustment function, automatic fault detection and alarm function; self-setting, multi-temperature point temperature correction function, temperature standby start, servo start

function, etc.

Process curve control function: (50 curves: the number of steps can reach 20 steps)

Operation control: provide two sets of control operations, one for touch screen operation and the other for backup button console. Process run can be manually run process and automatically run process selection.

Temperature waiting function: start the corresponding program segment operation according to the actual temperature of the furnace body.

Temperature correction function: provide the actual temperature correction function of the main temperature points in 8 sections, set the correction value of each temperature point and program the temperature smooth transition. Realize the precise control of each temperature area. The temperature curve provides the program run, hold, stop, jump function.

Alarm detection and recording function: overtemperature, disconnection and communication fault. The system has an unexpected power failure, and the program operation provides a variety of options (breakpoint start, standby

Startup, etc.)

Self-setting function of PID parameters

The system setting operation provides the permission setting

Main features and functions of the system:

The furnace wire current automatic detection equipment adopts high-power heating element, and the current fluctuates greatly, which affects the service life of the furnace wire. In view of this, on the one hand, by detecting the change of the current during the maximum load of the furnace wire, customers are reminded to pay attention to the furnace wire data, so as to replace the furnace body in time to ensure the normal operation of the equipment. On the other hand, we adopt the trigger mode of silicon-controlled phase shift to avoid the large fluctuation of the current of the furnace wire current in the constant temperature section, so as to extend the furnace body, service life, cost saving. At the same time, the software provides the record of the enabling time point of the furnace body, so as to facilitate the customers' intuitive data record for the use of the furnace body.

Temperature standby function 

Provide the temperature standby function, that is, after the end of the process, the equipment drops to a certain temperature for constant temperature, so as to improve for the next startup operation

High work productivity

Temperature correction function

Provide multi-temperature points, dynamic translation correction function. Easy to customer process main constant temperature section, temperature accurate control.temperature correction

Points, from one temperature to the next temperature point, during which the temperature correction value, is dynamically corrected according to the slope of the warming. Ensure smooth transition.

Data recording, storage and export function Real-time record of the process temperature data, provide storage and export function, facilitate the supervision of the process, and provide first-hand detailed information for the quality management of the production process

Main operation interface:

Temperature control parameter setting interface:

Real-time curve interface:

Historical curve, line interface:

Historial numbers, according to the export:

Nine, Safety protection and alarm:

1. Temperature protection alarm:

Other switch control, system and alarm systems

1. The system uses the IO unit of PLC to control the external signal input (such as buttons, sensor, etc.) and output (such as alarm output, various indicator lights, etc.). The alarm function of this system is quite complete, and the alarm information can also be displayed on the touch screen. In order to ensure the safe operation and rapid diagnosis of equipment faults, the equipment has a variety of safety interlocks and fault alarm functions. The various alarm conditions are as follows:

2. Temperature protection alarm:

1) Over-temperature alarm:

When the furnace temperature exceeds the set value, (the overtemperature setting value is set by the user himself), the screen will display the overtemperature. At this time, the overtemperature alarm, sound and temperature control will automatically leave the computer control and turn into the insulation state.

2) Extreme overtemperature alarm:

When the furnace temperature continues to rise beyond the alarm set value due to the fault and reaches the limit furnace temperature, the overtemperature heater will automatically power off. This prevents the heater from burning out. The setting value of the limit overtemperature alarm can be set according to the actual working temperature, but it shall not be higher than 1300℃.

3) Disconnect-even protection:

After the operation of the equipment is completed, when the hot couple is controlled,

disconnected or the contact is bad, there will be a fixed voltage to be input to the control system to inform the operator that the hot couple is faulty. At this time, the system will automatically switch to another hot couple and automatically call the corresponding data of another hot couple, so as to protect the heating system and process.

(Equipment site drawing is attached below)