Products
III-V single crystal VGF furnace
Specification of Gallium Arsenide single crystal furnace
Model number: BST-VGF46
1. Equipment overview
Equipment use: used for single crystal growth of gallium arsenide semiconductor material.
Degree of automation: semi-automatic, manual auxiliary loading material, automatic process control operation direction: facing the front of the equipment operation
The equipment is mainly composed of 4 sets of independent parts, each independent part includes the furnace body, lifting mechanism, temperature control system, power supply cabinet and other four components. The four parts are connected by cable to form the complete system. The single crystal furnace is the whole system, including all the required components. The supplier is responsible for installing the electrical distribution box connected to the demander.
1.1 Main parameter indicators
1 | Furnace structure: | Vertical single tube |
2 | Applicable single-crystal size: | 4/6 Inch |
3 | Furnace diameter: | 4/6 inch (Φ330mm) |
4 | Number of heating temperature sections: | 6 Duan |
5 | Number of display and monitoring segments: | 6 Duan |
6 | control method: | One tow and four microcomputer control |
7 | Maximum operating temperature of the furnace body: | 1280℃ |
8 | Heat up overshoot: | Better than the 0.2℃ |
9 | Slow cooling and overshoot during the growth process: | Better than the 0.2℃ |
10 | Temperature display accuracy: | 0.1℃ |
11 | Temperature control accuracy: | Better than ± 0.2℃ |
12 | The temperature difference can be set for adjacent temperature controls: | 0-3℃/cm |
13 | Thermocouple class: | S mould |
14 | Maximum heating power: | ～15KVA |
15 | Maximum thermal insulation power: | ～8KVA |
16 | Lift mechanism trip | 300mm (limit stroke of 350mm) |
17 | Lift mechanism rate | ≥0.05mm/h |
18 | The lifting mechanism is running and beating | 0.1mm/s |
19 | Voltage of each temperature zone of the furnace body | Zone1-6(16V\23V\17V\10V\10V\14V) |
20 | Current in each temperature zone of the furnace body | ≤110A |
21 | cooling-down method | forced air cooling |
22 | Power Supply Voltage: | Three-phase, 380V, 50Hz |
23 | control source: | One row of 220V and 24V wiring |
24 | Equipment structure form: | split type |
1.2 Furnace
Heating furnace body adopts φ 8.0, high quality imported heating wire, furnace body 6 section heating, 6 points of temperature control. The insulation layer is an imported temperature resistance and insulation material containing zirconium. The furnace body is blocked, and the head adopts imported zirconium-containing ceramic fiber to provide hardware support for the extension process. Advanced production process ensures the product quality and improves the product life, at the same time, the circle outside the heating furnace and the furnace wire are uniform, the central axis is symmetrical, effectively reduce the impact of the thermal field asymmetry on the crystal thermal stress.
1.3 Lift mechanism
The system is a frame structure of fixed furnace body and crystal growth components. The automatic lifting mechanism mainly adopts servo motor to drive the ball screw for transmission, and the tray slides on the linear guide rail. The imported wire rod and linear guide rail ensure the stability of the transmission system, which greatly increases the crystal rate of the product. The DC motor and driver of the device adopt subdivision circuit, and the equipment has upper and lower limit and limit levels, to ensure the reliability of the system movement.
1.4 Temperature control system
The temperature control system includes continental controller, upper growth machine, lower machine and data processing system. The temperature control system adopts multi-channel Continental controller VB control mode.
1.5 the Power supply cabinet
Including power regulation, transformer, motor controller. Power adjustment adopts high-quality power adjustment plate, with reliable trigger.
2. Major dispositions
No. | Item name | Quantity | Manufacturer/Brand | Notes |
1 | Furnace body | 1 set | ||
2 | Furnace silk | 1 set | enter port | |
3 | heat insulating material | 1 set | enter port | Morgan, UK |
4 | Lifting device | 1 set | ||
5 | DC motor and drive | 1 set | Huichuan | |
6 | Silk bar and guide rail | 1 set | On the silver | |
7 | Temperature control system | 1 set | domestic | |
8 | temperature controller | 1 set | domestic | |
9 | Power cabinet | 1 set | domestic | |
10 | transformer | 1 set | domestic |
3. Safety protection and measures
- Safety and warning signs have corresponding
- Identification leakage protection function at appropriate locations of the equipment
- Hot even break wire
- Protection alarm system over-temperature alarm system
4. Power Configuration
No. | Name | Parameter | Have Pour |
1 | Voltage power | 380V-25KW | Three-phase and four-wire lines (16²) |
