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Singel Wafer Cleaner
8 & 12 inch Silicon Wafer , Sapphire Wafer , SiC wafer
Specifications | |
Partical | ≧0.2um partical less than 10 |
Metal attachment | <3 E10 atoms / cm2 |
DI Water | 1L/ min /piece |
Drying time | ≦20S |
Recovery rate of chemical liquid | >95% |
Compressed Air | 0.6MPa ( Oil less ) |
Main Power | AC380V, 3Phase, 50/60Hz |
Dimension ( L x W x H ) | 2,000(W)×3,200(L)×2,800(H)mm |
