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Auto Wet Bench / RCA Cleaner

8 & 12 inch Silicon Wafer , Sapphire Wafer , SiC wafer

INQUIRY

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Specifications

Auto loading

2 Cassette   / batch

Main structural materials

PP+ PVC + sus304

Leakage detection device

Anticorrosive material,

Robot movement and lifting of the handling   accuracy

 ≤ 1mm

Compressed Air

0.6MPa ( Oil less )

PCW

5-20L/min, 0.1-0.3MPa

Main Power

AC380V, 3Phase, 50/60Hz

Dimension ( L x W x H )

4,000 (W) x 2,150 (D) x2000(H) mm