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22B Double-side Lapping System
High precision spindle, 4 way-motion driven by 4 Siemens motors
4 Motovari or Tsubaki gear reducers, variable speed control
SMC pneumatic components
Safety locking device for preventing up plate falling
Mitsubishi Electric PLC control of all major function
Touch screen control system
Transparent protective cover
Automatic conversion device for polishing slurry and cleaning water
Polishing slurry filter for preventing wafer scratch
Positive Flateness control
<table >
Specifications | ||
Upper plate | Size & materials | OD Ø1456×ID Ø488× 50mmt , QT600 |
Speed | 3-20 rpm | |
Motor | 7.5kW AC380V 50Hz | |
Bottom plate | Size & materials | OD Ø1456×ID Ø488× 50mmt , QT600 |
Speed | 3-28rpm | |
Motor | 11kW AC380V 50Hz | |
Insert Carriers | Dimension | PCD Ø552, M3 Z184 |
Max. Number | 5 PCS | |
Sun gear | Speed | 3-17rpm |
Motor | 2.2kW AC380V 50Hz | |
Circle gear | Speed | 2-13rpm |
Motor | 3kW AC380V 50Hz | |
Lifting range | 30mm | |
Lifting motor | 0.75kW AC380V 50Hz | |
Main power | AC380V 3Phase 50Hz | |
Compressed air | 0.6MPa ( Oil less ) Ø 10 | |
Water | DI water, Ø 10 | |
Dimension | 2,374(W)×2100(L)×2878(H)mm | |
Weight | 8,500kg | |
