Specifications | |
Wafer size | 6 inch ~ 8 inch |
Liuquid wax | SKYLIUQUID ABR-4016 |
Wax temperature | 80~95 ℃ |
Ceramic block | Ø485mm or Ø520mm |
Wax thickness | 1~2 ㎛ |
Compressed Air | 0.6MPa ( Oil less ) |
PCW | 5-20L/min, 0.1-0.3MPa |
Main Power | AC380V, 3Phase, 50/60Hz |
Environment | Clean rooms above 1000 |
Dimension ( L x W x H ) | 2,800(W)×2200(L)×2300(H)mm |
Weight | 2,000kg |