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SP59 CMP System
4 Holder type pneumatic multi step pressure system, separate control
Solid integrated frame, anti-corrosion treatment for pipeline and plate
SMC pneumatic components
High precision spindle system, variable speed control
Mitsubishi Electric PLC control of all major function
Touch screen control system
CMP slurry center supply system with chiller system
Automatic loading & taking off for ceramic block (+BTR)
Automatic temperature control and water cooling system
CMP slurry flow automatic control system, accuracy of 0.1l/min
CMP slurry filter for preventing wafer scratch
Specifications | ||
4 head upper plate | Size & materials | OD Ø590，SUS410 |
Speed | 0-60rpm | |
Servo Motor | 0.75kw AC380V 50Hz | |
Bottom plate | Size & materials | O.DØ1490×I.DØ310, SUS410 |
Speed | 0-60rpm | |
Motor | 22kW 380V 3P 50/60Hz | |
Ceramic block | Dimension | Ø590 mm |
Max. Number | 4 PCS | |
Polishing head pressure range | 0-500kg | |
Main plate Chiller power | AC380V, 50/60Hz, 3 Phase，13.86kw（6HP） | |
Slurry Chiller power | AC380V, 50/60Hz, 3 Phase, 5.85kw（3HP） | |
Main power | AC380V 3Phase 50Hz | |
Compressed air | 0.6MPa ( Oil less ) Ø 10 | |
Cooling Water | DI water, Ø 10 | |
Environment | clean rooms above 10000 | |
Dimension | 2,374(W)×2100(L)×2878(H)mm | |
Weight | 9,500kg | |
